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Sywert Brongersma

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You can introduce the air gap in the middle of the dielectric or on the edges of the lines. One is easier to process; the other offers more mechanical stability for the line afterwards. Commodore 64 er computeren, der lokker til demo-programmering. You can introduce the air gap in the middle of the dielectric or on the edges of the lines. One is easier to process; the other offers more mechanical stability for the line afterwards.

Sometimes it's a combination that works best, where the plasma treatment makes the pore size on the sidewall just small enough so that the barrier layer deposits easily and closes faster when you deposit it.

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