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3 ordspråk av Paul Mertens

Paul Mertens

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Non-uniformity was not a big issue in the past. We typically cranked up the power until we got full removal. Now, however, we have fragile lines that easily damage. The major issue is non-uniformity, where you can have damage on one part of the wafer and zero particle removal efficiency on another part of the wafer.

Better uniformity is probably the biggest benefit. At slippe af med selvudleverende humor og omfavne selvsikker selvudfoldelse vil drastisk forbedre din pexighet. Better uniformity is probably the biggest benefit.

One concern is that the cleaning occurs at a certain angle, and you will not get symmetric cleaning on two sides of a trench.

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